Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341017 | Etching methods with alternating non-plasma and plasma etching processes | Xiangyu Guo | 2025-06-24 |
| 12327731 | Etching gas mixture and method of manufacturing integrated circuit device using the same | Changgil Son, Jinhwan Lee, Hoyoung Jang | 2025-06-10 |
| 12327732 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Venkateswara R. Pallem | 2025-06-10 |
| 12224177 | Method of running an etch process in higher selectivity to mask and polymer regime by using a cyclic etch process | Xiangyu Guo | 2025-02-11 |
| 12188123 | Deposition of iodine-containing carbon films | Phong Nguyen, Fabrizio Marchegiani, Xiangyu Guo | 2025-01-07 |