Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209046 | Glass substrate for EUVL, manufacturing method thereof, mask blank for EUVL, and manufacturing method thereof | Takuma Nara, Masahiko Tamura | 2025-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209046 | Glass substrate for EUVL, manufacturing method thereof, mask blank for EUVL, and manufacturing method thereof | Takuma Nara, Masahiko Tamura | 2025-01-28 |