Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293933 | Electrostatic chuck with multiple heater zones | Sang-Woo Lee | 2025-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293933 | Electrostatic chuck with multiple heater zones | Sang-Woo Lee | 2025-05-06 |