Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934109 | Overlay alignment mark and method for measuring overlay error | Weimin Ma, Chengcheng Liu, Shouyan Huang | 2024-03-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934109 | Overlay alignment mark and method for measuring overlay error | Weimin Ma, Chengcheng Liu, Shouyan Huang | 2024-03-19 |