Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140505 | Wafer processing apparatus and control method thereof | Ji-Hoon Song, Ji Ho Park | 2024-11-12 |
| 12074054 | Wafer processing apparatus and wafer processing method | Ji-Hoon Song, Ung Jo MOON, Ji Ho Park | 2024-08-27 |
| 11901212 | Wafer processing apparatus and wafer processing method | Ji-Hoon Song, Ung Jo MOON, Ji Ho Park, Won Seok Choi | 2024-02-13 |
| 11901214 | Wafer processing apparatus and method of controlling the same | Ji Ho Park, Ung Jo MOON, Ki Hun Park | 2024-02-13 |