Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154819 | Wafer cleaning apparatus and method of controlling the same | Seung Dae Baek, Kuem Dong HEO, Jae Hwan SON, Nam-Jin Kim, Jun Goo PARK | 2024-11-26 |
| 11915965 | Wafer processing method | Seung Dae Baek, Jin Won Kim, Jae Hwan SON | 2024-02-27 |