Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105421 | Highly thick spin-on-carbon hard mask composition and patterning method using same | Su Jin Lee, Seung Hun Lee, Seung Hyun Lee | 2024-10-01 |
| 12094719 | Etching pattern forming method in semiconductor manufacturing process | Su Jin Lee, Seung Hun Lee, Seung Hyun Lee | 2024-09-17 |