Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12024777 | Method of processing substrate | Dae Seong Lee, Hyeon Beom Gwon | 2024-07-02 |
| 12027371 | Substrate processing method | Ah Young Hwang, Won-Jun Jang, Joo Suop Kim, Sang Rok Nam, Hae Jin Ahn +2 more | 2024-07-02 |
| 11965244 | Substrate processing method, substrate processing apparatus using the same, and semiconductor device manufacturing method | Hyeon Beom Gwon, Dae Seong Lee | 2024-04-23 |