Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12122702 | Ultrapure water supply apparatus, substrate processing system including the same, and substrate processing method using the same | Jongha YUN, Juhui PARK, Jiyeon Lee, Cheolmin Shin | 2024-10-22 |
| 11966144 | Tunable dielectric resonators for freespace light intensity modulation | Victor Brar | 2024-04-23 |