Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12166329 | High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method | Weihua Jiang, Hiroshi Umeda | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12166329 | High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method | Weihua Jiang, Hiroshi Umeda | 2024-12-10 |