Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940736 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yoshifumi Ueno, Shinji Nagai | 2024-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940736 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yoshifumi Ueno, Shinji Nagai | 2024-03-26 |