Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11905305 | Silicon precursor compound, preparation method therefor, and silicon-containing film formation method using same | Myeong Ho Kim, Mi Hee Lee, Byung Kwan KIM, Jun Hwan CHOI, Sungwoo AHN +1 more | 2024-02-20 |