Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106979 | Apparatus and method for controlling temperature uniformity of substrate | Jin-Gyun Kim, Chang Uk Ahn, Ji-Won Lee, In Chan Beck | 2024-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106979 | Apparatus and method for controlling temperature uniformity of substrate | Jin-Gyun Kim, Chang Uk Ahn, Ji-Won Lee, In Chan Beck | 2024-10-01 |