TN

Toshihiko Nakahata

UL Ulvac: 1 patents #3 of 44Top 7%
Overall (2024): #237,080 of 561,600Top 45%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11972932 Deposition method and deposition apparatus Kazuyoshi Hashimoto, Harumasa Yamaguchi 2024-04-30