Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014946 | Electrostatic chuck, vacuum processing apparatus, and substrate processing method | Hidekazu Yokoo | 2024-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014946 | Electrostatic chuck, vacuum processing apparatus, and substrate processing method | Hidekazu Yokoo | 2024-06-18 |