Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163221 | System for continuous atomic layer deposition | Jeffrey W. Elam, Joseph A. Libera | 2024-12-10 |
| 12006570 | Atomic layer deposition for continuous, high-speed thin films | Jeffrey W. Elam, Joseph A. Libera | 2024-06-11 |