Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169367 | Vertical motion protection method and device based on dual-stage motion system of photolithography machine | Rong Cheng, Yu Zhu, Ming Zhang, Sheng LEI, Tao Liu +2 more | 2024-12-17 |
| 12038690 | Laser interference photolithography system | Leijie Wang, Yu Zhu, Ming Zhang, Jitao Xu, Xin Li +2 more | 2024-07-16 |
| 11940349 | Plane grating calibration system | Leijie Wang, Ming Zhang, Yu Zhu, Jiankun Hao, Xin Li +2 more | 2024-03-26 |