Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148601 | Method of plasma processing a substrate in a plasma chamber and plasma processing system | Wojciech Gajewski, Krzysztof Ruda | 2024-11-19 |
| 11929233 | Method of adjusting the output power of a power supply supplying electrical power to a plasma, plasma apparatus and power supply | Krzysztof Ruda, Mateusz Wiosna, Grzegorz Toczylowski, Jialei Chen | 2024-03-12 |