Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170193 | Temperature estimation apparatus, plasma processing system, temperature estimation method and temperature estimation program | Hiroshi Nagahata | 2024-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170193 | Temperature estimation apparatus, plasma processing system, temperature estimation method and temperature estimation program | Hiroshi Nagahata | 2024-12-17 |