Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176224 | Substrate processing apparatus and substrate processing method | Kazuhiro Aiura | 2024-12-24 |
| 12142496 | Substrate processing apparatus and substrate processing method | Kazuhiro Aiura | 2024-11-12 |
| 12133297 | Substrate processing apparatus | Akira Fujita | 2024-10-29 |