Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942308 | Microwave plasma source, microwave plasma processing apparatus and plasma processing method | — | 2024-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942308 | Microwave plasma source, microwave plasma processing apparatus and plasma processing method | — | 2024-03-26 |