Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094700 | Film forming method, film forming apparatus, and program | — | 2024-09-17 |
| 12062559 | Substrate processing system, substrate processing method, and control program | Takafumi Matsuhashi, Minoru Nagasawa, Kunio Takano | 2024-08-13 |
| 11908712 | Semiconductor manufacturing apparatus, substrate transfer method, and program | Takafumi Matsuhashi, Kunio Takano, Minoru Nagasawa | 2024-02-20 |