Takehiro Ueda

TL Tokyo Electron Limited: 2 patents #140 of 870Top 20%

RE Renesas Electronics: 1 patents #21 of 143Top 15%

Overall (2024): #64,059 of 561,600Top 15%

Patents 2024

Issued Patents 2024

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date
11929240	Substrate support, substrate processing apparatus, and substrate processing method	—	2024-03-12
11923228	Stage and plasma processing apparatus	—	2024-03-05
11887935	Semiconductor device and manufacturing method thereof	—	2024-01-30