Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12090529 | Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus | Junichi Sasaki | 2024-09-17 |
| 11865591 | Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus | Junichi Sasaki | 2024-01-09 |