Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104251 | Substrate processing method and substrate processing apparatus | Tatsuya Yamaguchi | 2024-10-01 |
| 12051571 | Substrate processing method and substrate processing system | Kazuya Ichiki, Tatsuya Yamaguchi | 2024-07-30 |
| 11923242 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi | 2024-03-05 |