Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027353 | Substrate processing method and apparatus | Hiroyuki Toshima, Hiroyuki Iwashita, Tatsuo Hirasawa | 2024-07-02 |
| 12014911 | Sputtering apparatus | Tatsuo Hirasawa, Hiroyuki Toshima, Hiroyuki Iwashita | 2024-06-18 |