SI

Shigeru Ishizawa

TL Tokyo Electron Limited: 2 patents #140 of 870Top 20%
📍 Rifu, JP: #66 of 305 inventorsTop 25%
Overall (2024): #117,811 of 561,600Top 25%
2
Patents 2024

Issued Patents 2024

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
12094696 Focus ring replacement method and plasma processing system — 2024-09-17
11990323 Focus ring replacement method and plasma processing system — 2024-05-21