Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862489 | Substrate processing apparatus with electronic heater powered by power feeding coil | Kouzou Kawahara | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862489 | Substrate processing apparatus with electronic heater powered by power feeding coil | Kouzou Kawahara | 2024-01-02 |