Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142495 | Etching method and etching apparatus | Toshiki Kanaki, Megumi Umemoto | 2024-11-12 |
| 12054824 | Substrate processing method and substrate processing apparatus | Junichiro MATSUNAGA, Kiyotaka Horikawa | 2024-08-06 |
| 12003183 | Power conversion device and power conversion unit | Yuki Yoshizumi | 2024-06-04 |