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Michiaki Matsushita

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #340,388 of 561,600Top 65%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12077392 Substrate transfer apparatus and substrate transfer method Hitoshi Hashima, Tohru TOCHIHARA, Hidekazu Kiyama 2024-09-03