Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154790 | Etching method and plasma processing apparatus | Seiichi Watanabe, Manabu Sato, Hiroki Yamada, Shinji Orimo | 2024-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154790 | Etching method and plasma processing apparatus | Seiichi Watanabe, Manabu Sato, Hiroki Yamada, Shinji Orimo | 2024-11-26 |