Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11971661 | Substrate processing apparatus and substrate processing method | Yoji Sakata, Tsuyoshi Watanabe | 2024-04-30 |
| 11869789 | Substrate processing apparatus and substrate processing method | Tsuyoshi Watanabe, Suguru Enokida, Taro Yamamoto | 2024-01-09 |