Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12017261 | Processing apparatus and cleaning processing method | Tomoya Hasegawa, Masaki Kurokawa | 2024-06-25 |
| 11926891 | Cleaning method and processing apparatus | — | 2024-03-12 |
| 11894249 | Control device, processing apparatus, and control method | Tsubasa WATANABE, Tomoya Hasegawa | 2024-02-06 |