Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12091753 | Substrate processing apparatus | — | 2024-09-17 |
| 11869798 | Deposition apparatus | Yudo SUGAWARA, Noriko Sato | 2024-01-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12091753 | Substrate processing apparatus | — | 2024-09-17 |
| 11869798 | Deposition apparatus | Yudo SUGAWARA, Noriko Sato | 2024-01-09 |