Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993848 | Gas nozzle, substrate processing apparatus, and substrate processing method | Satoru Ogawa | 2024-05-28 |
| 11885024 | Gas introduction structure and processing apparatus | Hiroki IRIUDA, Reita IGARASHI | 2024-01-30 |
| 11859285 | Processing apparatus and processing method | Hiroki IRIUDA | 2024-01-02 |