Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165848 | Substrate processing method, substrate processing apparatus, and method for producing nanowire or nanosheet transistor | Shohei Yamauchi, Kazuya Dobashi, Akitaka Shimizu | 2024-12-10 |