Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881379 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2024-01-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881379 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2024-01-23 |