Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094737 | Substrate processing apparatus, control method, and computer-readable storage medium | Masayuki Kajiwara, Daisuke Ishimaru, Takuya Tajiri, Atsushi Yamamoto, Masato Imamura +5 more | 2024-09-17 |