Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087562 | Substrate processing apparatus, substrate processing system, and abnormality detection method | Kazushi Hikawa | 2024-09-10 |
| 11873560 | Abnormality detection system and control board | Toshio Hasegawa, Shohei Yoshida, Takeshi Shinohara, Shinji Kawasaki | 2024-01-16 |