Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11885003 | Rotational drive device, substrate processing apparatus, and rotational driving method | Yasutomo Kimura | 2024-01-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11885003 | Rotational drive device, substrate processing apparatus, and rotational driving method | Yasutomo Kimura | 2024-01-30 |