Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062557 | Substrate processing system and particle removal method | Genichi Nanasaki, Daisuke Hara, Hikaru Nihei, Tatsuya Morioka, Akihiro Matsui | 2024-08-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062557 | Substrate processing system and particle removal method | Genichi Nanasaki, Daisuke Hara, Hikaru Nihei, Tatsuya Morioka, Akihiro Matsui | 2024-08-13 |