Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955360 | Electrostatic chuck and processing apparatus | Tomohiro NAKASUJI, Akira Itoh, Kentaro Seto, Yutaka Omoto, Hiroho Kitada +1 more | 2024-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955360 | Electrostatic chuck and processing apparatus | Tomohiro NAKASUJI, Akira Itoh, Kentaro Seto, Yutaka Omoto, Hiroho Kitada +1 more | 2024-04-09 |