Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131936 | Alignment and transport of substrate and focus ring | Tatsuyuki Urata | 2024-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131936 | Alignment and transport of substrate and focus ring | Tatsuyuki Urata | 2024-10-29 |