Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165909 | Screwless semiconductor processing chambers | Bo-Ru CHEN, Che-Fu Chen | 2024-12-10 |
| 12154813 | Electrostatic chuck sidewall gas curtain | Ian Hsieh, Che-Fu Chen | 2024-11-26 |
| 12101920 | Conductive polymeric layers for charge dissipation | Yuxuan Liu, Zhifeng Li, Carlo Waldfried, Chandra Venkatraman, Pushkara R. Varanasi | 2024-09-24 |
| 12040205 | Systems and methods for inspection stations | Chien-Chih Wu, Che-Fu Chen | 2024-07-16 |
| 12014933 | Semiconductor device fabrication with removal of accumulation of material from sidewall | Yeh-Chien Lin, Jin-Huai Chang | 2024-06-18 |
| 11993854 | Chamber wall polymer protection system and method | Po-Hsun Tseng | 2024-05-28 |