Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077850 | Physical vapor deposition apparatus | Kuo-Lung HOU, Ming-Hsien Lin | 2024-09-03 |
| 12080587 | Apparatus for preventing backside peeling defects on semiconductor wafers | Yen-Yu Chen, Wei-Jen Chen, Yi-Chen Chiang, Tsang-Yang Liu, Chang-Sheng Lee +1 more | 2024-09-03 |
| 11955322 | Device for adjusting position of chamber and plasma process chamber including the same for semiconductor manufacturing | Ming-Che CHEN | 2024-04-09 |