Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051593 | Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the target | Chun-Jung Huang, Po-Feng Tsai, Henry Peng, Kuang-Huan Hsu, Tsung Wei Chen +1 more | 2024-07-30 |