Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972963 | Wafer transfer module and method thereof for transferring to-be-transferred wafer | Yu Ren, Kaiqu Ang, Zaifeng Tang | 2024-04-30 |
| 11911809 | Preventive maintenance method for chamber of metal etching machine | Minjie Chen, Zaifeng Tang, Yu Ren | 2024-02-27 |