DH

De-Fang Huang

TSMC: 1 patents #2,264 of 4,162Top 55%
Overall (2024): #487,606 of 561,600Top 90%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11880140 Method and apparatus for dynamic lithographic exposure Jun-Yih Yu, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu 2024-01-23