Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119273 | System and method for high speed inspection of semiconductor substrates | Sheng-He Huang, Shiue-Ming GUO, Hsuan-Chia KAO, Yan Chen, Sheng-Ching Kao +1 more | 2024-10-15 |
| 12087611 | Semiconductor processing tool and methods of operation | Kai-Lin Chuang, Sheng-Wen Huang, Yan Chen, Jun Liu | 2024-09-10 |
| 12038389 | Wafer inspection apparatus and method | — | 2024-07-16 |
| 11935722 | Machine learning on wafer defect review | Sheng-Wen Huang, Jun Liu | 2024-03-19 |