Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153341 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chih-Wei Wen | 2024-11-26 |
| 12085848 | Photomask cleaning tool | Pin-Cheng CHEN, Chih-Wei Wen, Ting-Hsien Ko | 2024-09-10 |
| 12009238 | Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device | Po-Chien Huang, Chih-Wei Wen | 2024-06-11 |